THE DURHAM ATS GROUP IS PROUD TO REPRESENT THE PRODUCTS AND SERVICES OFFERED BY THESE QUALITY COMPANIES.

CVD / Etch / Strip:

IMI
Integrated Materials, Inc. is the semiconductor industry's leading manufacturer of an extensive line of pure All-Silicon structures: towers, injectors, pedestals, tube liners, platens and other products vital to the manufacture of integrated circuits.

OnWafer
ONWAFER - Wireless Mission Capable Temperature Profiling Wafers coupled with OnView and AutoCal Software.

Osram
OSRAM GmbH - Mercury Short Arc Lamps for Lithography and RTP Processes.

RST
'Radiant Source Technology, Inc.- The leading specialty lamp supplier for the semiconductor and other high tech industries. Providing specialized applications and lamp solutions from Osram, Ushio, GE, Philips and other custom manufacturers.'

TriFact
TRIFACT SOLUTIONS - VUV (172 nm) Dry Organic Removal System for Resist and Sidewall Polymers.