THE DURHAM ATS GROUP IS PROUD TO REPRESENT THE PRODUCTS AND SERVICES OFFERED BY THESE QUALITY COMPANIES.

Photolithography:

Brooks Automation
BROOKS AUTOMATION - Reticle Stockers, Machine Alignment Tools, Exhaust Control Systems, and Product Tracking / Monitoring Products

OmniSpecialty (No Site)
OMNISPECIALTY - New and Replacement Chemical?Filters for DUV Track and Stepper Systems.

OnWafer
ONWAFER - Wireless Mission Capable Temperature Profiling Wafers coupled with OnView and AutoCal Software.

Osram
OSRAM GmbH - Mercury Short Arc Lamps for Lithography and RTP Processes.

RST
Radiant Source Technology, Inc.- The leading specialty lamp supplier for the semiconductor and other high tech industries. Providing specialized applications and lamp solutions from Osram, Ushio, GE, Philips and other custom manufacturers.

TriFact
TRIFACT SOLUTIONS, Inc. - On Demand or Recirc Inline Chemical Heater / VUV (172 nm)Dry Organic Removal System for Resist and Sidewall Polymers.